Sensor device

Vladimir Pashchenko; Paul  Muralt; Hanspeter Zinn

Sensor device

Vladimir Pashchenko (Inventor), Paul Muralt (Inventor), Hanspeter Zinn (Inventor)

Research output: Patent

Abstract

Disclosed is a sensor device (1) comprising a piezoelectric transducer (3) and a base member (2). The piezoelectric transducer comprises a piezoelectric member with at least one excitation electrode (37, 38) connected to a first face thereof and having a thickness (h) between the first face and a second face. The piezoelectric transducer (3) is attached to a supporting face of the base member (2) with the second face of the piezoelectric transducer adjacent the supporting face of the base member. The base member comprises at least one acoustic wave reflecting tag (21) distant from the piezo-electric member.

Original language	English
Patent number	US20200326313A1
Publication status	Published - 15 Oct 2020

Keywords

SAW
piezoelectric
MEMS
BAW
thin film

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Cite this

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title = "Sensor device",

abstract = "Disclosed is a sensor device (1) comprising a piezoelectric transducer (3) and a base member (2). The piezoelectric transducer comprises a piezoelectric member with at least one excitation electrode (37, 38) connected to a first face thereof and having a thickness (h) between the first face and a second face. The piezoelectric transducer (3) is attached to a supporting face of the base member (2) with the second face of the piezoelectric transducer adjacent the supporting face of the base member. The base member comprises at least one acoustic wave reflecting tag (21) distant from the piezo-electric member.",

keywords = "SAW, piezoelectric, MEMS, BAW, thin film",

author = "Vladimir Pashchenko and Paul Muralt and Hanspeter Zinn",

year = "2020",

month = oct,

day = "15",

language = "English",

type = "Patent",

note = "US20200326313A1",

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TY - PAT

T1 - Sensor device

AU - Pashchenko, Vladimir

AU - Muralt, Paul

AU - Zinn, Hanspeter

PY - 2020/10/15

Y1 - 2020/10/15

N2 - Disclosed is a sensor device (1) comprising a piezoelectric transducer (3) and a base member (2). The piezoelectric transducer comprises a piezoelectric member with at least one excitation electrode (37, 38) connected to a first face thereof and having a thickness (h) between the first face and a second face. The piezoelectric transducer (3) is attached to a supporting face of the base member (2) with the second face of the piezoelectric transducer adjacent the supporting face of the base member. The base member comprises at least one acoustic wave reflecting tag (21) distant from the piezo-electric member.

AB - Disclosed is a sensor device (1) comprising a piezoelectric transducer (3) and a base member (2). The piezoelectric transducer comprises a piezoelectric member with at least one excitation electrode (37, 38) connected to a first face thereof and having a thickness (h) between the first face and a second face. The piezoelectric transducer (3) is attached to a supporting face of the base member (2) with the second face of the piezoelectric transducer adjacent the supporting face of the base member. The base member comprises at least one acoustic wave reflecting tag (21) distant from the piezo-electric member.

KW - SAW

KW - piezoelectric

KW - MEMS

KW - BAW

KW - thin film

M3 - Patent

M1 - US20200326313A1

ER -

Sensor device

Abstract

Keywords

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Cite this