Abstract
Sensitive element of an accelerometer on surface acoustic waves comprises an interdigital transducer, connected with a transceiving antenna, and two lattices of reflectors made as mirror-symmetrical relative to the interdigital transducer and forming a resonator structure on surface acoustic waves, at the same time it is equipped with a single structure, made of single-crystal silicon, and comprising a frame, a cantilever of triangular shape, the base of which is fixed to the frame at its inner side, an inertia mass, located on one side of the cantilever, and a piezoelectric film, applied on the second side of the cantilever, besides, the interdigital transducer and lattices of reflectors are applied onto the surface of the piezoelectric film, the transceiving antenna is located along the perimeter of the frame.
EFFECT: reduced error of measurements, increased accuracy and sensitivity of an accelerometer on surface acoustic waves.
EFFECT: reduced error of measurements, increased accuracy and sensitivity of an accelerometer on surface acoustic waves.
| Translated title of the contribution | SENSITIVE ELEMENT OF ACCELEROMETER ON SURFACE ACOUSTIC WAVES |
|---|---|
| Original language | Russian |
| Patent number | RU2556284C1 |
| Priority date | 1/04/14 |
| Filing date | 1/04/14 |
| Publication status | Published - 10 Jul 2015 |