Resonant PZT MEMS Mirror with Segmented Electrodes

Adrien Piot; Jaka Pribosek; Jordan Maufay; Johannes Schicker; Andreas Tortschanoff; Ramin Matloub; Paul Muralt; Mohssen Moridi

doi:10.1109/MEMS46641.2020.9056124

Resonant PZT MEMS Mirror with Segmented Electrodes

Adrien Piot, Jaka Pribosek, Jordan Maufay, Johannes Schicker, Andreas Tortschanoff, Ramin Matloub, Paul Muralt, Mohssen Moridi

Photonic Systems (PHOS)

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
Pages	517-520
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056124
Publication status	Published - Jan 2020
Event	2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada Duration: 18 Jan 2020 → 22 Jan 2020

Conference

Conference	2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Period	18/01/20 → 22/01/20

Access to Document

10.1109/MEMS46641.2020.9056124

https://ieeexplore.ieee.org/document/9056124/

Cite this

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title = "Resonant PZT MEMS Mirror with Segmented Electrodes",

author = "Adrien Piot and Jaka Pribosek and Jordan Maufay and Johannes Schicker and Andreas Tortschanoff and Ramin Matloub and Paul Muralt and Mohssen Moridi",

year = "2020",

month = jan,

doi = "10.1109/MEMS46641.2020.9056124",

language = "English",

pages = "517--520",

note = "2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 18-01-2020 Through 22-01-2020",

}

TY - CONF

T1 - Resonant PZT MEMS Mirror with Segmented Electrodes

AU - Piot, Adrien

AU - Pribosek, Jaka

AU - Maufay, Jordan

AU - Schicker, Johannes

AU - Tortschanoff, Andreas

AU - Matloub, Ramin

AU - Muralt, Paul

AU - Moridi, Mohssen

PY - 2020/1

Y1 - 2020/1

U2 - 10.1109/MEMS46641.2020.9056124

DO - 10.1109/MEMS46641.2020.9056124

M3 - Paper

SP - 517

EP - 520

T2 - 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 18 January 2020 through 22 January 2020

ER -