@inproceedings{670f393463e64fb0a4399cf0928c69cc,
title = "Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing",
keywords = "Raman spectroscopy, semiconductor, stress, silicon, silicon carbide",
author = "Biasio, {M. De} and M. Kraft and E. Geier and B. Goller and Ch. Bergmann and R. Esteve and M. Cerezuela-Barreto and D. Lewke and M. Schellenberger and M. Roesner",
year = "2017",
doi = "10.1117/12.2259927",
language = "English",
volume = "10210",
pages = "133 -- 140",
editor = "Druy, {Mark A.} and Crocombe, {Richard A.} and Barnett, {Steven M.} and Profeta, {Luisa T.}",
booktitle = "Next-Generation Spectroscopic Technologies X",
}