Position encoding and phase control of resonant MOEMS-mirros

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

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@inproceedings{ee0c8eaf93b64841aaa775cd77120f25,

title = "Position encoding and phase control of resonant MOEMS-mirros",

author = "A. Tortschanoff and M. Lenzhofer and A. Frank and M. Wildenhain and T. Sandner and H. Schenk and A. Kenda",

year = "2009",

doi = "10.1016/j.proche.2009.07.328",

language = "English",

booktitle = "Procedia Chemistry",

}

TY - GEN

T1 - Position encoding and phase control of resonant MOEMS-mirros

AU - Tortschanoff, A.

AU - Lenzhofer, M.

AU - Frank, A.

AU - Wildenhain, M.

AU - Sandner, T.

AU - Schenk, H.

AU - Kenda, A.

PY - 2009

Y1 - 2009

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-71549142565&partnerID=MN8TOARS

U2 - 10.1016/j.proche.2009.07.328

DO - 10.1016/j.proche.2009.07.328

M3 - Conference Paper

BT - Procedia Chemistry

ER -