TY - JOUR
T1 - Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
AU - Xu, Tingzhong
AU - Wang, Hongyan
AU - Xia, Yong
AU - Zhao, Zhiming
AU - Huang, Mimi
AU - Wang, Jiuhong
AU - Zhao, Libo
AU - Zhao, Yulong
AU - Jiang, Zhuangde
PY - 2017/12/1
Y1 - 2017/12/1
N2 - A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultralow- pressure measurement. The pressure sensor was designed with a working range of 0–500 Pa and had a high sensitivity of 0.06 mV·V–1·Pa–1. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.
AB - A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultralow- pressure measurement. The pressure sensor was designed with a working range of 0–500 Pa and had a high sensitivity of 0.06 mV·V–1·Pa–1. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.
KW - MEMS
KW - low pressure sensor
KW - medical application
KW - peninsulaisland
KW - ultra-high sensitivity
UR - https://www.mendeley.com/catalogue/a03345d6-b521-3d87-b639-8790f4f71225/
U2 - 10.1007/s11465-017-0447-9
DO - 10.1007/s11465-017-0447-9
M3 - Article
SN - 2095-0241
VL - 12
SP - 546
EP - 553
JO - Frontiers of Mechanical Engineering
JF - Frontiers of Mechanical Engineering
IS - 4
ER -