Piezoelectric Response of ZnO Thin Films Grown By Plasma-Enhanced Atomic Layer Deposition

Julian Pilz

Research output: Contribution to conference (No Proceedings) › Abstract › peer-review

Original languageEnglish
Publication statusPublished - Oct 2019
Externally publishedYes
EventAVS 66th International Symposium - Columbus, United States
Duration: 20 Oct 2019 → …

Conference

ConferenceAVS 66th International Symposium
Country/TerritoryUnited States
CityColumbus
Period20/10/19 → …

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