Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Taher Abu Ali; Julian Pilz; Philipp Schäffner; Markus Kratzer; Christian Teichert; Barbara Stadlober; Anna Maria Coclite

doi:10.1002/pssa.202000319

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner, Markus Kratzer, Christian Teichert, Barbara Stadlober, Anna Maria Coclite

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	physica status solidi (a)
DOIs	https://doi.org/10.1002/pssa.202000319
Publication status	Published - 22 Nov 2020
Externally published	Yes

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10.1002/pssa.202000319

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title = "Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition",

author = "Ali, {Taher Abu} and Julian Pilz and Philipp Sch{\"a}ffner and Markus Kratzer and Christian Teichert and Barbara Stadlober and Coclite, {Anna Maria}",

year = "2020",

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doi = "10.1002/pssa.202000319",

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T1 - Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

AU - Ali, Taher Abu

AU - Pilz, Julian

AU - Schäffner, Philipp

AU - Kratzer, Markus

AU - Teichert, Christian

AU - Stadlober, Barbara

AU - Coclite, Anna Maria

PY - 2020/11/22

Y1 - 2020/11/22

UR - https://doi.org/10.1002/pssa.202000319

U2 - 10.1002/pssa.202000319

DO - 10.1002/pssa.202000319

M3 - Artikel

JO - physica status solidi (a)

JF - physica status solidi (a)

ER -

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

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