PIEZOELECTRIC MICROMIRROR USING INTEGRATED RESONANT SENSORS WITH TEMPERATURE COMPENSATION FUNCTION

Takashi Sasaki; Adrien Piot; Sara Rodrigues Palma Guerreiro; Anton Lagosh; Rodrigo Tumolin Rocha; Clément Fleury; Dominik Holzmann; Ales Travnik

doi:10.1109/MEMS64181.2026.11419602

PIEZOELECTRIC MICROMIRROR USING INTEGRATED RESONANT SENSORS WITH TEMPERATURE COMPENSATION FUNCTION

Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review

Original language	English
Title of host publication	The 39th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026)
DOIs	https://doi.org/10.1109/MEMS64181.2026.11419602
Publication status	Published - 11 Mar 2026

Access to Document

10.1109/MEMS64181.2026.11419602

Cite this

@inproceedings{2103a8057de744d48f2cc8f50018a7b6,

title = "PIEZOELECTRIC MICROMIRROR USING INTEGRATED RESONANT SENSORS WITH TEMPERATURE COMPENSATION FUNCTION",

author = "Takashi Sasaki and Adrien Piot and \{Rodrigues Palma Guerreiro\}, Sara and Anton Lagosh and Rocha, \{Rodrigo Tumolin\} and Cl{\'e}ment Fleury and Dominik Holzmann and Ales Travnik",

year = "2026",

month = mar,

day = "11",

doi = "10.1109/MEMS64181.2026.11419602",

language = "English",

booktitle = "The 39th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026)",

}

TY - GEN

T1 - PIEZOELECTRIC MICROMIRROR USING INTEGRATED RESONANT SENSORS WITH TEMPERATURE COMPENSATION FUNCTION

AU - Sasaki, Takashi

AU - Piot, Adrien

AU - Rodrigues Palma Guerreiro, Sara

AU - Lagosh, Anton

AU - Rocha, Rodrigo Tumolin

AU - Fleury, Clément

AU - Holzmann, Dominik

AU - Travnik, Ales

PY - 2026/3/11

Y1 - 2026/3/11

U2 - 10.1109/MEMS64181.2026.11419602

DO - 10.1109/MEMS64181.2026.11419602

M3 - Conference Paper

BT - The 39th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026)

ER -