Optical position feedback of quasi-static 2D MOEMS mirrors

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2016852
Publication status	Published - 2013

Access to Document

@inproceedings{4627a8240a3246aba90a8d267f236cbd,

title = "Optical position feedback of quasi-static 2D MOEMS mirrors",

author = "A. Tortschanoff and M. Baumgart and D. Holzmann and M. Lenzhofer and T. Sandner and A. Kenda",

year = "2013",

doi = "10.1117/12.2016852",

language = "English",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Optical position feedback of quasi-static 2D MOEMS mirrors

AU - Tortschanoff, A.

AU - Baumgart, M.

AU - Holzmann, D.

AU - Lenzhofer, M.

AU - Sandner, T.

AU - Kenda, A.

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84881152613&partnerID=MN8TOARS

U2 - 10.1117/12.2016852

DO - 10.1117/12.2016852

M3 - Conference Paper

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -