| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE 7594 |
| Publication status | Published - 2010 |
Optical Position Feedback and Phase Control of MOEMS-Scanner Mirrors
Andreas Tortschanoff, Martin Lenzhofer, Albert Frank, M. Wildenhain, T. Sandner, H. Schenk, Andreas Kenda
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review