| Original language | English |
|---|---|
| Publication status | Published - 2012 |
| Event | SPG Jahrestagung - Zürich, Zürich, Switzerland Duration: 1 Jan 2012 → … |
Conference
| Conference | SPG Jahrestagung |
|---|---|
| Country/Territory | Switzerland |
| City | Zürich |
| Period | 1/01/12 → … |
Optical position feedback and closed loop control for electrostatically driven MOEMS mirrors
Research output: Contribution to conference (No Proceedings) › Paper › peer-review