| Original language | English |
|---|---|
| Publication status | Published - 2014 |
| Event | nanoFIS 2014 - Functional Integrated nano Systems - Duration: 1 Jan 2014 → … |
Conference
| Conference | nanoFIS 2014 - Functional Integrated nano Systems |
|---|---|
| Period | 1/01/14 → … |
Optical Position Detection Concept and Design Criteria for Micromirrors
Research output: Contribution to conference (No Proceedings) › Paper › peer-review