Abstract
A kind of support beam type MEMS fluids thermal conductivity and thermal diffusion coefficient sensor and its preparation and method of testing disclosed by the invention, heater is arranged on the upper face center of substrate, pad is located at the side of upper surface of substrate heater, with heater connection, insulating layer of thin-film is covered on heater, pad and substrate, cavity is provided with insulating layer of thin-film in heater both sides, base bottom is provided with back of the body chamber, forms support beam structure.Heater is used as temperature sensor simultaneously；Heater is elongated, belt-shaped structure, connects heater and pad by four leads respectively.Sensor makes to treat fluid measured as substrate by the use of chamber is carried on the back, and can directly treat flow measurement bulk thermal conductivities and thermal diffusivity is measured, simplify testing process.Sensor proposed by the invention can be used for the thermal conductivity and thermal diffusion coefficient for measuring conductive and non-conductive micro liquid.
| Translated title of the contribution | One kind support beam type MEMS fluids thermal conductivity and thermal diffusion coefficient sensor and its preparation and method of testing |
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| Original language | Chinese (Simplified) |
| Patent number | CN107037079A |
| Publication status | Published - 2017 |