On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

Julian Pilz, Alberto Perrotta, Stefan Pachmajer, Antonella Milella, Anna Maria Coclite

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Beilstein journal of nanotechnology
DOIs	https://doi.org/10.3762/bjnano.10.74
Publication status	Published - 21 Mar 2019
Externally published	Yes

Access to Document

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title = "On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition",

author = "Julian Pilz and Alberto Perrotta and Stefan Pachmajer and Antonella Milella and Coclite, {Anna Maria}",

year = "2019",

month = mar,

day = "21",

doi = "10.3762/bjnano.10.74",

language = "English",

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TY - JOUR

T1 - On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

AU - Pilz, Julian

AU - Perrotta, Alberto

AU - Pachmajer, Stefan

AU - Milella, Antonella

AU - Coclite, Anna Maria

PY - 2019/3/21

Y1 - 2019/3/21

UR - http://dx.doi.org/10.3762/bjnano.10.74

U2 - 10.3762/bjnano.10.74

DO - 10.3762/bjnano.10.74

M3 - Article

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

ER -