Numerical investigation of a plasmonic slot waveguide for CO2 sensing application

Parviz Saeidi, Bernhard Jakoby, Gerald Pühringer, Andreas Tortschanoff, Gerald Stocker, Jasmin Spettel, Florian Dubois, Thomas Grille, Reyhaneh Jannesari

Research output: Contribution to conference (No Proceedings)Poster


In this work, a sensor based on a plasmonic slot waveguide (PSWG) is
numerically designed and investigated. The sensor consists of a gold PSWG
on a silicon oxide substrate which is coated with a thin silicon nitride layer.
The waveguide was optimized using COMSOL Multiphysics based on the
finite element method for a wavelength of 4.26 µm. This wavelength
corresponds to the center of the mid-infrared absorption lines of CO2 gas
representing a typical sensing application. A figure of merit (FOM), which is
given by a product of confinement factor and propagation length, i.e. two
crucial parameters for sensing applications, was calculated. To characterize
the propagation length, the imaginary part of the effective mode index of a
guided mode is considered, resulting in a dimensionless FOM. The best FOM
for the optimized parameters is 70.1.
Original languageEnglish
Publication statusPublished - 1 Jun 2022
EventMicroelectronic System Symposium - Hasu der Ingenieure, Eschenbachgasse 9, Vienna, Austria
Duration: 1 Jun 20222 Jun 2022


ConferenceMicroelectronic System Symposium
Abbreviated titleMESS22
Internet address


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