Abstract
In this work, a sensor based on a plasmonic slot waveguide (PSWG) is
numerically designed and investigated. The sensor consists of a gold PSWG
on a silicon oxide substrate which is coated with a thin silicon nitride layer.
The waveguide was optimized using COMSOL Multiphysics based on the
finite element method for a wavelength of 4.26 µm. This wavelength
corresponds to the center of the mid-infrared absorption lines of CO2 gas
representing a typical sensing application. A figure of merit (FOM), which is
given by a product of confinement factor and propagation length, i.e. two
crucial parameters for sensing applications, was calculated. To characterize
the propagation length, the imaginary part of the effective mode index of a
guided mode is considered, resulting in a dimensionless FOM. The best FOM
for the optimized parameters is 70.1.
numerically designed and investigated. The sensor consists of a gold PSWG
on a silicon oxide substrate which is coated with a thin silicon nitride layer.
The waveguide was optimized using COMSOL Multiphysics based on the
finite element method for a wavelength of 4.26 µm. This wavelength
corresponds to the center of the mid-infrared absorption lines of CO2 gas
representing a typical sensing application. A figure of merit (FOM), which is
given by a product of confinement factor and propagation length, i.e. two
crucial parameters for sensing applications, was calculated. To characterize
the propagation length, the imaginary part of the effective mode index of a
guided mode is considered, resulting in a dimensionless FOM. The best FOM
for the optimized parameters is 70.1.
Original language | English |
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Publication status | Published - 1 Jun 2022 |
Event | Microelectronic System Symposium - Hasu der Ingenieure, Eschenbachgasse 9, Vienna, Austria Duration: 1 Jun 2022 → 2 Jun 2022 http://www.mess.co.at/ |
Conference
Conference | Microelectronic System Symposium |
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Abbreviated title | MESS22 |
Country/Territory | Austria |
City | Vienna |
Period | 1/06/22 → 2/06/22 |
Internet address |