Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

Tingzhong Xu; Libo Zhao; Dejiang Lu; Zhikang Li; Na Zhao; Zhuangde Jiang

doi:10.1109/NEMS.2018.8556943

Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

Tingzhong Xu, Libo Zhao, Dejiang Lu, Zhikang Li, Na Zhao, Zhuangde Jiang

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

Abstract

This paper presented a novel piezoelectric micromachined ultrasonic transducer (PMUT) based on mechanical coupling between an annular diaphragm and a circular diaphragm stacking together. The circular diaphragm whose pedestal grounded on the middle of the annular diaphragm, which formed a base excitation system. Compared to non-coupled traditional circular diaphragm PMUTs, the proposed PMUTs achieved higher transmission sensitivity by 173% with the resonant frequency of 6.14 MHz in water, due to the base excitation amplification of the circular diaphragm. Also, the array transmission performance of the proposed PMUT and non-coupled traditional PMUT with circular diaphragm was compared in the same array dimension. The results indicated that the array composed by the proposed PMUT had less cross-Talk effect, which kept the central working frequency almost the same when it work solely.

Original language	English
Title of host publication	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	216-220
Number of pages	5
ISBN (Print)	9781538652732
DOIs	https://doi.org/10.1109/NEMS.2018.8556943
Publication status	Published - 3 Dec 2018

Publication series

Name	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Keywords

PMUT
high transmission sensitivity
low cross-Talk effect
mechanical coupling

Access to Document

10.1109/NEMS.2018.8556943

Cite this

Xu, T., Zhao, L., Lu, D., Li, Z., Zhao, N., & Jiang, Z. (2018). Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 216-220). (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2018.8556943

Xu, Tingzhong ; Zhao, Libo ; Lu, Dejiang et al. / Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 216-220 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

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title = "Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System",

abstract = "This paper presented a novel piezoelectric micromachined ultrasonic transducer (PMUT) based on mechanical coupling between an annular diaphragm and a circular diaphragm stacking together. The circular diaphragm whose pedestal grounded on the middle of the annular diaphragm, which formed a base excitation system. Compared to non-coupled traditional circular diaphragm PMUTs, the proposed PMUTs achieved higher transmission sensitivity by 173% with the resonant frequency of 6.14 MHz in water, due to the base excitation amplification of the circular diaphragm. Also, the array transmission performance of the proposed PMUT and non-coupled traditional PMUT with circular diaphragm was compared in the same array dimension. The results indicated that the array composed by the proposed PMUT had less cross-Talk effect, which kept the central working frequency almost the same when it work solely.",

keywords = "PMUT, high transmission sensitivity, low cross-Talk effect, mechanical coupling",

author = "Tingzhong Xu and Libo Zhao and Dejiang Lu and Zhikang Li and Na Zhao and Zhuangde Jiang",

year = "2018",

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doi = "10.1109/NEMS.2018.8556943",

language = "English",

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series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "216--220",

booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

address = "United States",

}

Xu, T, Zhao, L, Lu, D, Li, Z, Zhao, N & Jiang, Z 2018, Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Institute of Electrical and Electronics Engineers Inc., pp. 216-220. https://doi.org/10.1109/NEMS.2018.8556943

Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. / Xu, Tingzhong; Zhao, Libo; Lu, Dejiang et al.
NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. p. 216-220 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

TY - CHAP

T1 - Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

AU - Xu, Tingzhong

AU - Zhao, Libo

AU - Lu, Dejiang

AU - Li, Zhikang

AU - Zhao, Na

AU - Jiang, Zhuangde

PY - 2018/12/3

Y1 - 2018/12/3

N2 - This paper presented a novel piezoelectric micromachined ultrasonic transducer (PMUT) based on mechanical coupling between an annular diaphragm and a circular diaphragm stacking together. The circular diaphragm whose pedestal grounded on the middle of the annular diaphragm, which formed a base excitation system. Compared to non-coupled traditional circular diaphragm PMUTs, the proposed PMUTs achieved higher transmission sensitivity by 173% with the resonant frequency of 6.14 MHz in water, due to the base excitation amplification of the circular diaphragm. Also, the array transmission performance of the proposed PMUT and non-coupled traditional PMUT with circular diaphragm was compared in the same array dimension. The results indicated that the array composed by the proposed PMUT had less cross-Talk effect, which kept the central working frequency almost the same when it work solely.

AB - This paper presented a novel piezoelectric micromachined ultrasonic transducer (PMUT) based on mechanical coupling between an annular diaphragm and a circular diaphragm stacking together. The circular diaphragm whose pedestal grounded on the middle of the annular diaphragm, which formed a base excitation system. Compared to non-coupled traditional circular diaphragm PMUTs, the proposed PMUTs achieved higher transmission sensitivity by 173% with the resonant frequency of 6.14 MHz in water, due to the base excitation amplification of the circular diaphragm. Also, the array transmission performance of the proposed PMUT and non-coupled traditional PMUT with circular diaphragm was compared in the same array dimension. The results indicated that the array composed by the proposed PMUT had less cross-Talk effect, which kept the central working frequency almost the same when it work solely.

KW - PMUT

KW - high transmission sensitivity

KW - low cross-Talk effect

KW - mechanical coupling

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U2 - 10.1109/NEMS.2018.8556943

DO - 10.1109/NEMS.2018.8556943

M3 - Chapter

SN - 9781538652732

T3 - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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BT - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

PB - Institute of Electrical and Electronics Engineers Inc.

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Xu T, Zhao L, Lu D, Li Z, Zhao N, Jiang Z. Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc. 2018. p. 216-220. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). doi: 10.1109/NEMS.2018.8556943

Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

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