Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

Y. Ma, J. Kaczynski, C. Ranacher, A. Roshanghias, M. Zauner, B. Abasahl

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Microelectronic Engineering
DOIs	https://doi.org/10.1016/j.mee.2018.06.013
Publication status	Published - 2018

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TY - JOUR

T1 - Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

AU - Ma, Y.

AU - Kaczynski, J.

AU - Ranacher, C.

AU - Roshanghias, A.

AU - Zauner, M.

AU - Abasahl, B.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85049519868&partnerID=MN8TOARS

U2 - 10.1016/j.mee.2018.06.013

DO - 10.1016/j.mee.2018.06.013

M3 - Article

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -