Original language | Undefined/Unknown |
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Journal | Journal of Optical Microsystems |
DOIs | |
Publication status | Published - 2021 |
Externally published | Yes |
Multileveled tunable silicon grating array bonded on large scale integration substrate by polymers
Tomohiro Suzuki, Chernroj Sawasdivorn, Takashi Sasaki, Hiroshi Matsuura, Kazuhiro Hane
Research output: Contribution to journal › Article › peer-review