Multileveled tunable silicon grating array bonded on large scale integration substrate by polymers

Tomohiro Suzuki, Chernroj Sawasdivorn, Takashi Sasaki, Hiroshi Matsuura, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
JournalJournal of Optical Microsystems
DOIs
Publication statusPublished - 2021
Externally publishedYes

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