Mirror device, scanning laser device and scanning laser display including same mirror device, and method for manufacturing mirror device

Takashi Sasaki (Inventor), Kazuhiro Hane (Inventor), Tung Thanh Nguyen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS 2021/0055542 A1
Publication statusPublished - 25 Feb 2021
Externally publishedYes

Cite this