Microfabrication and characterization of dual-frequency piezoelectric micromachined ultrasonic transducers

Lixiang Wu, Mohssen Moridi, Gaofeng Wang, Qifa Zhou

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
DOIs	https://doi.org/10.1109/isaf51943.2021.9477337
Publication status	Published - 12 Jul 2021

Access to Document

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title = "Microfabrication and characterization of dual-frequency piezoelectric micromachined ultrasonic transducers",

author = "Lixiang Wu and Mohssen Moridi and Gaofeng Wang and Qifa Zhou",

year = "2021",

month = jul,

day = "12",

doi = "10.1109/isaf51943.2021.9477337",

language = "English",

isbn = "9781665404440",

booktitle = "2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF)",

}

TY - GEN

T1 - Microfabrication and characterization of dual-frequency piezoelectric micromachined ultrasonic transducers

AU - Wu, Lixiang

AU - Moridi, Mohssen

AU - Wang, Gaofeng

AU - Zhou, Qifa

PY - 2021/7/12

Y1 - 2021/7/12

U2 - 10.1109/isaf51943.2021.9477337

DO - 10.1109/isaf51943.2021.9477337

M3 - Conference Paper

SN - 9781665404440

BT - 2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF)

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