MEMS-mirror tilt-detection based on a quadrant diode scheme

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	21st IMEKO TC2 Symposium on Photonics in Measurement
Publication status	Published - 2013

Cite this

TY - GEN

T1 - MEMS-mirror tilt-detection based on a quadrant diode scheme

AU - Tortschanoff, A.

AU - Baumgart, M.

AU - Holzmann, D.

AU - Lenzhofer, M.

AU - Mayer, Ch

AU - Sandner, T.

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84905717469&partnerID=MN8TOARS

M3 - Konferenzartikel

BT - 21st IMEKO TC2 Symposium on Photonics in Measurement

ER -