Low pull-in voltage electrostatic MEMS switch using liquid dielectric

Mohammed Affan Zidan, King Abdullah University of Science Technology, Khaled N Salama

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Original languageEnglish
Title of host publication2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)
Pages169-172
Number of pages4
Publication statusPublished - 2014
Externally publishedYes

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