Last developments in the angular response and deformation characterization of resonant micromirrors

Clément Fleury; Muhammad Hassan Khan; Diana Mori; Sara Rodrigues Palma Guerreiro; Rodrigo Tumolin Rocha; Dominik Holzmann; Takashi Sasaki; Adrien Piot

Last developments in the angular response and deformation characterization of resonant micromirrors

Research output: Conference proceeding/Chapter in Book › Conference Paper

Abstract

Characterization of micromirror in terms of optical performance during actuation has always been challenging. Two years ago, we introduced a method that makes use of digital holography and variable mirror positioning to sample the shape of the mirror at an arbitrary position in its movement. Here we present further development of the technique, including a methodology to perform fast frequency sweeps. We demonstrate the capabilities by comparing the deformation to analytical derivation from amplitude and frequency.

Original language	English
Title of host publication	EUROSENSORSXXXVI
Place of Publication	Debrecen (Hungary)
Pages	487-488
Number of pages	2
ISBN (Electronic)	978-3-910600-03-4
Publication status	Published - 1 Sept 2024

Cite this

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title = "Last developments in the angular response and deformation characterization of resonant micromirrors",

abstract = "Characterization of micromirror in terms of optical performance during actuation has always been challenging. Two years ago, we introduced a method that makes use of digital holography and variable mirror positioning to sample the shape of the mirror at an arbitrary position in its movement. Here we present further development of the technique, including a methodology to perform fast frequency sweeps. We demonstrate the capabilities by comparing the deformation to analytical derivation from amplitude and frequency.",

author = "Cl{\'e}ment Fleury and Khan, \{Muhammad Hassan\} and Diana Mori and \{Rodrigues Palma Guerreiro\}, Sara and Rocha, \{Rodrigo Tumolin\} and Dominik Holzmann and Takashi Sasaki and Adrien Piot",

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language = "English",

pages = "487--488",

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T1 - Last developments in the angular response and deformation characterization of resonant micromirrors

AU - Fleury, Clément

AU - Khan, Muhammad Hassan

AU - Mori, Diana

AU - Rodrigues Palma Guerreiro, Sara

AU - Rocha, Rodrigo Tumolin

AU - Holzmann, Dominik

AU - Sasaki, Takashi

AU - Piot, Adrien

PY - 2024/9/1

Y1 - 2024/9/1

N2 - Characterization of micromirror in terms of optical performance during actuation has always been challenging. Two years ago, we introduced a method that makes use of digital holography and variable mirror positioning to sample the shape of the mirror at an arbitrary position in its movement. Here we present further development of the technique, including a methodology to perform fast frequency sweeps. We demonstrate the capabilities by comparing the deformation to analytical derivation from amplitude and frequency.

AB - Characterization of micromirror in terms of optical performance during actuation has always been challenging. Two years ago, we introduced a method that makes use of digital holography and variable mirror positioning to sample the shape of the mirror at an arbitrary position in its movement. Here we present further development of the technique, including a methodology to perform fast frequency sweeps. We demonstrate the capabilities by comparing the deformation to analytical derivation from amplitude and frequency.

M3 - Conference Paper

SP - 487

EP - 488

BT - EUROSENSORSXXXVI

CY - Debrecen (Hungary)

ER -

Last developments in the angular response and deformation characterization of resonant micromirrors

Abstract

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