Abstract
The invention discloses a kind of high transmitting powers, through-hole type structure ultrasonic transducer of low-work voltage and preparation method thereof, through-hole type structure ultrasonic transducer includes vibration film, pillar, insulating layer and lower electrode, wherein, vibration film forms top electrode by heavy doping, its geomery is consistent with cavity structure, the pillar is etched with cavity structure, the cavity structure includes through-hole cavity and conventional cavity, the presence of through-hole cavity is by independent conventional cavity is open-minded originally in traditional structure unit, each unit is promoted to connect by through-hole, it is clamped that the original periphery fixed of conventional elements is changed to quadrangle, and then reduce rigidity, increase electrostatic force region, and then reduce operating voltage, improve electromechanical coupling factor, increase transmission power and packing ratio.
| Translated title of the contribution | kind of through-hole capacitance type micromachined ultrasonic energy converter and preparation method |
|---|---|
| Original language | Chinese (Simplified) |
| Patent number | CN110217753A |
| Publication status | Published - 2019 |