TY - JOUR
T1 - Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
AU - Bardong, Jochen
AU - Binder, Alfred
AU - Toskov, Sasa
AU - Miskovic, Goran
AU - Radosavljevic, Goran
PY - 2016/3/17
Y1 - 2016/3/17
N2 - Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 450°C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.
AB - Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 450°C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.
UR - https://www.mendeley.com/catalogue/51eecc06-f8ff-3cdb-b50f-e9e842c47448/
U2 - 10.5194/jsss-5-85-2016
DO - 10.5194/jsss-5-85-2016
M3 - Article
VL - 5
SP - 85
EP - 93
JO - Journal of Sensors and Sensor Systems
JF - Journal of Sensors and Sensor Systems
IS - 1
ER -