Integrated packaging of 2D MOEMS mirrors with optical position feedback

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2079219
Publication status	Published - 2015

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@inproceedings{a603ce73328a4b7087a2e85dfa5bcf83,

title = "Integrated packaging of 2D MOEMS mirrors with optical position feedback",

author = "M. Baumgart and M. Lenzhofer and M.P. Kremer and A. Tortschanoff",

year = "2015",

doi = "10.1117/12.2079219",

language = "undefiniert/unbekannt",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Integrated packaging of 2D MOEMS mirrors with optical position feedback

AU - Baumgart, M.

AU - Lenzhofer, M.

AU - Kremer, M.P.

AU - Tortschanoff, A.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84927132238&partnerID=MN8TOARS

U2 - 10.1117/12.2079219

DO - 10.1117/12.2079219

M3 - Konferenzartikel

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -