Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO

Alberto Perrotta, Julian Pilz, Roland Resel, Oliver Werzer, Anna Maria Coclite

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@article{d71079a1886b4f1180c546b875218107,

title = "Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO",

author = "Alberto Perrotta and Julian Pilz and Roland Resel and Oliver Werzer and Coclite, {Anna Maria}",

year = "2020",

month = apr,

day = "10",

doi = "10.3390/cryst10040291",

language = "undefiniert/unbekannt",

}

TY - JOUR

T1 - Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO

AU - Perrotta, Alberto

AU - Pilz, Julian

AU - Resel, Roland

AU - Werzer, Oliver

AU - Coclite, Anna Maria

PY - 2020/4/10

Y1 - 2020/4/10

UR - https://doi.org/10.3390/cryst10040291

U2 - 10.3390/cryst10040291

DO - 10.3390/cryst10040291

M3 - Artikel

JO - Crystals

JF - Crystals

ER -