High Temperature Silicon Pressure Sensors

Zhuangde Jiang, Yulong Zhao, Libo Zhao, Tingzhong Xu

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

Original language	English
Title of host publication	Micro Electro Mechanical Systems
Pages	325-385
Number of pages	61
DOIs	https://doi.org/10.1007/978-981-10-5945-2_16
Publication status	Published - 2018

Access to Document

TY - CHAP

T1 - High Temperature Silicon Pressure Sensors

AU - Jiang, Zhuangde

AU - Zhao, Yulong

AU - Zhao, Libo

AU - Xu, Tingzhong

PY - 2018

Y1 - 2018

UR - https://www.mendeley.com/catalogue/4901bff9-caaf-3f9b-92d7-68ba18e3f628/

U2 - 10.1007/978-981-10-5945-2_16

DO - 10.1007/978-981-10-5945-2_16

M3 - Chapter

SP - 325

EP - 385

BT - Micro Electro Mechanical Systems

ER -