Functional MOEMS packaging with optical position feedback

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7180901
Publication status	Published - 2015

Access to Document

@inproceedings{fa98951174ed4eb7b152ade78d006ba7,

title = "Functional MOEMS packaging with optical position feedback",

author = "A. Tortschanoff and M. Baumgart and M. Lenzhofer",

year = "2015",

doi = "10.1109/TRANSDUCERS.2015.7180901",

language = "undefiniert/unbekannt",

booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

}

TY - GEN

T1 - Functional MOEMS packaging with optical position feedback

AU - Tortschanoff, A.

AU - Baumgart, M.

AU - Lenzhofer, M.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84955484668&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2015.7180901

DO - 10.1109/TRANSDUCERS.2015.7180901

M3 - Konferenzartikel

BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

ER -