Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films

Vladimir Pashchenko, Fazel Parsapour, Hugo Chambon, Pascal Nicolay, Ingo Bleyl, Ulrike Rösler, Paul Muralt

Research output: Contribution to conference (No Proceedings) › Poster › peer-review

Original language	English
Publication status	Published - 14 Jul 2019
Event	International Workshop on PiezoMEMS - Lausanne, Switzerland Duration: 14 Jul 2019 → 19 Jul 2019 https://lausanne2019.org/

Workshop	International Workshop on PiezoMEMS
Abbreviated title	PiezoMEMS
Country/Territory	Switzerland
City	Lausanne
Period	14/07/19 → 19/07/19
Internet address	https://lausanne2019.org/

Cite this

@conference{14e2c503e72f40f7b850c7e21e94acaa,

title = "Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films",

author = "Vladimir Pashchenko and Fazel Parsapour and Hugo Chambon and Pascal Nicolay and Ingo Bleyl and Ulrike R{\"o}sler and Paul Muralt",

year = "2019",

month = jul,

day = "14",

language = "English",

note = "International Workshop on PiezoMEMS, PiezoMEMS ; Conference date: 14-07-2019 Through 19-07-2019",

url = "https://lausanne2019.org/",

}

TY - CONF

T1 - Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films

AU - Pashchenko, Vladimir

AU - Parsapour, Fazel

AU - Chambon, Hugo

AU - Nicolay, Pascal

AU - Bleyl, Ingo

AU - Rösler, Ulrike

AU - Muralt, Paul

PY - 2019/7/14

Y1 - 2019/7/14

M3 - Poster

T2 - International Workshop on PiezoMEMS

Y2 - 14 July 2019 through 19 July 2019

ER -