Finely control groove-depth variations of large-area diffraction gratings

university of science and technology china; K. Q. Qiu; X. L. Jiang; Y. C. Zheng; X. D. Xu; Y. L. Hong; S. J. Fu

doi:937411
10.1117/12.2077396

Finely control groove-depth variations of large-area diffraction gratings

university of science and technology china, K. Q. Qiu, X. L. Jiang, Y. C. Zheng, X. D. Xu, Y. L. Hong, S. J. Fu

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

Original language	Undefined/Unknown
Title of host publication	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics Viii
DOIs	https://doi.org/937411 10.1117/12.2077396
Publication status	Published - 2015
Externally published	Yes

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937411 10.1117/12.2077396

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title = "Finely control groove-depth variations of large-area diffraction gratings",

author = "china, {university of science and technology} and Qiu, {K. Q.} and Jiang, {X. L.} and Zheng, {Y. C.} and Xu, {X. D.} and Hong, {Y. L.} and Fu, {S. J.}",

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doi = "937411 10.1117/12.2077396",

language = "undefiniert/unbekannt",

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TY - CHAP

T1 - Finely control groove-depth variations of large-area diffraction gratings

AU - china, university of science and technology

AU - Qiu, K. Q.

AU - Jiang, X. L.

AU - Zheng, Y. C.

AU - Xu, X. D.

AU - Hong, Y. L.

AU - Fu, S. J.

PY - 2015

Y1 - 2015

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000354200600022&KeyUID=WOS:000354200600022

U2 - 937411 10.1117/12.2077396

DO - 937411 10.1117/12.2077396

M3 - Kapitel

BT - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics Viii

ER -

Finely control groove-depth variations of large-area diffraction gratings

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