Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT

Victor Plessky; Vladimir Pashchenko; Vladimir Kalinin; Ventsislav  Yantchev

Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT

Victor Plessky, Vladimir Pashchenko, Vladimir Kalinin, Ventsislav Yantchev

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

We discuss here the possibility of using suspended metal electrodes for the excitation of surface acoustic wave (SAW) and single-mode bulk acoustic wave (BAW) resonator structures. The idea is, on one hand, to separate the driving electrodes from the piezoelectric substrate, being also the acoustic wave carrier substrate. While, on the other, to employ grooved surface gratings which can either reflect the SAW or convert it to resonant multimode BAW, respectively. The proposed approach is thought to eliminate mechanic losses caused by the electrodes, to reduce their parasitic ohmic resistance as well as to improve the resonator aging and power handling abilities. Further, the proposed approach enable the simultaneous use of periodical structures with different periodicity in such a way that one mode in a multimode BAW resonator can be selectively excited.

Original language	English
Title of host publication	Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT
Publication status	Published - 19 Nov 2015
Event	2014 European Frequency and Time Forum - Neuchatel, Switzerland Duration: 23 Jun 2014 → 26 Jun 2014

Conference

Conference	2014 European Frequency and Time Forum
Abbreviated title	EFTF
Country/Territory	Switzerland
City	Neuchatel
Period	23/06/14 → 26/06/14

Cite this

@inproceedings{f9e2d6f6eaca4e2991e9990580f3746b,

title = "Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT",

abstract = "We discuss here the possibility of using suspended metal electrodes for the excitation of surface acoustic wave (SAW) and single-mode bulk acoustic wave (BAW) resonator structures. The idea is, on one hand, to separate the driving electrodes from the piezoelectric substrate, being also the acoustic wave carrier substrate. While, on the other, to employ grooved surface gratings which can either reflect the SAW or convert it to resonant multimode BAW, respectively. The proposed approach is thought to eliminate mechanic losses caused by the electrodes, to reduce their parasitic ohmic resistance as well as to improve the resonator aging and power handling abilities. Further, the proposed approach enable the simultaneous use of periodical structures with different periodicity in such a way that one mode in a multimode BAW resonator can be selectively excited.",

author = "Victor Plessky and Vladimir Pashchenko and Vladimir Kalinin and Ventsislav Yantchev",

year = "2015",

month = nov,

day = "19",

language = "English",

booktitle = "Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT",

note = " 2014 European Frequency and Time Forum , EFTF ; Conference date: 23-06-2014 Through 26-06-2014",

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TY - GEN

T1 - Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT

AU - Plessky, Victor

AU - Pashchenko, Vladimir

AU - Kalinin, Vladimir

AU - Yantchev, Ventsislav

PY - 2015/11/19

Y1 - 2015/11/19

N2 - We discuss here the possibility of using suspended metal electrodes for the excitation of surface acoustic wave (SAW) and single-mode bulk acoustic wave (BAW) resonator structures. The idea is, on one hand, to separate the driving electrodes from the piezoelectric substrate, being also the acoustic wave carrier substrate. While, on the other, to employ grooved surface gratings which can either reflect the SAW or convert it to resonant multimode BAW, respectively. The proposed approach is thought to eliminate mechanic losses caused by the electrodes, to reduce their parasitic ohmic resistance as well as to improve the resonator aging and power handling abilities. Further, the proposed approach enable the simultaneous use of periodical structures with different periodicity in such a way that one mode in a multimode BAW resonator can be selectively excited.

AB - We discuss here the possibility of using suspended metal electrodes for the excitation of surface acoustic wave (SAW) and single-mode bulk acoustic wave (BAW) resonator structures. The idea is, on one hand, to separate the driving electrodes from the piezoelectric substrate, being also the acoustic wave carrier substrate. While, on the other, to employ grooved surface gratings which can either reflect the SAW or convert it to resonant multimode BAW, respectively. The proposed approach is thought to eliminate mechanic losses caused by the electrodes, to reduce their parasitic ohmic resistance as well as to improve the resonator aging and power handling abilities. Further, the proposed approach enable the simultaneous use of periodical structures with different periodicity in such a way that one mode in a multimode BAW resonator can be selectively excited.

M3 - Conference Paper

BT - Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT

T2 - 2014 European Frequency and Time Forum

Y2 - 23 June 2014 through 26 June 2014

ER -

Excitation of SAW resonators and BAW-overmoded resonators by suspended IDT

Abstract

Conference

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