静电-压电混合驱动收发一体化cmut及其使用方法和制备方法

Translated title of the contribution: Electrostatic-transceiving integrated CMUT of piezoelectricity combination drive and its application method and preparation method

Zhikang Li (Inventor), Libo Zhao (Inventor), Jie Li (Inventor), Yihe Zhao (Inventor), Guoxi Luo (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science