Abstract
The invention discloses electrostatic-transceiving integrated CMUT of piezoelectricity combination drive and its application method and preparation method, pillar uses piezoelectric material, can generate dilatation or vibration under the effect of positive bucking voltage；CMUT successively includes top electrode, vibration film, piezoelectricity pillar, insulating layer and lower electrode from top to bottom.Lower electrode and top electrode cover entire cavity and piezoelectricity post area.When as ultrasound transmitting transducer, normal polarity DC offset voltage is loaded, piezoelectricity pillar stretches, cavity height increases, it is possible to increase vibration film displacement space improves output acoustic pressure, after being superimposed alternating voltage, vibration film and piezoelectricity pillar vibrate, and emit ultrasonic wave；When receiving energy converter as ultrasonic wave, load reversed polarity DC offset voltage, piezoelectricity strut compresses, cavity height reduces, capacitance change and receiving sensitivity can be improved, when ultrasonic wave incidence, vibration film and piezoelectricity pillar vibrate, detectable electric signal is generated, realizes that ultrasonic wave receives.
Classifications
Classifications
| Translated title of the contribution | Electrostatic-transceiving integrated CMUT of piezoelectricity combination drive and its application method and preparation method |
|---|---|
| Original language | Chinese (Simplified) |
| Patent number | CN109092649A |
| Publication status | Published - 2018 |