Diaphragm shape effect on the performance of foil-based capacitive pressure sensors

Sherjeel Khan, R. B. Mishra, N. Qaiser, A. M. Hussain, M. M. Hussain

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TY - JOUR

T1 - Diaphragm shape effect on the performance of foil-based capacitive pressure sensors

AU - Khan, Sherjeel

AU - Mishra, R. B.

AU - Qaiser, N.

AU - Hussain, A. M.

AU - Hussain, M. M.

PY - 2020/1/1

Y1 - 2020/1/1

UR - https://doi.org/10.1063/1.5128475

U2 - 10.1063/1.5128475

DO - 10.1063/1.5128475

M3 - Article

SN - 2158-3226

JO - AIP Advances

JF - AIP Advances

ER -