Development of a Low Cost, Miniature Thermal Conductivity Vacuum Gauge for Integration Purposes

Martin Lenzhofer, Jochen Bardong, Pascal Nicolay, Andreas Kenda

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	177 - 180
Journal	International Journal of Computer and Electronics Research
Volume	2014
Issue number	4
Publication status	Published - Aug 2014

Cite this

TY - JOUR

T1 - Development of a Low Cost, Miniature Thermal Conductivity Vacuum Gauge for Integration Purposes

AU - Lenzhofer, Martin

AU - Bardong, Jochen

AU - Nicolay, Pascal

AU - Kenda, Andreas

PY - 2014/8

Y1 - 2014/8

M3 - Article

SN - 2278-5795

VL - 2014

SP - 177

EP - 180

JO - International Journal of Computer and Electronics Research

JF - International Journal of Computer and Electronics Research

IS - 4

ER -