Original language | Undefined/Unknown |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
DOIs | |
Publication status | Published - 2014 |
Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives
A. Kenda, M. Kraft, A. Tortschanoff, W. Scherf, T. Sandner, H. Schenk, S. Luettjohann, A. Simon
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review