Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

A. Kenda, M. Kraft, A. Tortschanoff, W. Scherf, T. Sandner, H. Schenk, S. Luettjohann, A. Simon

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
Publication statusPublished - 2014

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