Deposition and patterning of electrodes on the vertical sidewalls of deep trenches

L Bonnin, A Piot, N Isac, A Bosseboeuf

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	105014
Journal	Journal of Micromechanics and Microengineering
Volume	30
Issue number	10
DOIs	https://doi.org/10.1088/1361-6439/aba377
Publication status	Published - 1 Oct 2020

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title = "Deposition and patterning of electrodes on the vertical sidewalls of deep trenches",

author = "L Bonnin and A Piot and N Isac and A Bosseboeuf",

year = "2020",

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doi = "10.1088/1361-6439/aba377",

language = "English",

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T1 - Deposition and patterning of electrodes on the vertical sidewalls of deep trenches

AU - Bonnin, L

AU - Piot, A

AU - Isac, N

AU - Bosseboeuf, A

PY - 2020/10/1

Y1 - 2020/10/1

U2 - 10.1088/1361-6439/aba377

DO - 10.1088/1361-6439/aba377

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VL - 30

SP - 105014

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 10

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