Original language | English |
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Journal | Sensors and Actuators A: Physical |
Volume | 2020 |
Issue number | 112201 |
DOIs | |
Publication status | Published - 2020 |
Computationally efficient model for viscous damping in perforated MEMS structures
J. Kaczynski, C. Ranacher, C. Fleury
Research output: Contribution to journal › Article › peer-review