TY - CONF
T1 - Compact optical position feedback scheme for MOEMS mirrors
AU - Tortschanoff, Andreas
AU - Baumgart, M.
AU - Holzmann, D.
AU - Lenzhofer, M.
AU - Sandner, T.
AU - Kenda, A.
PY - 2014
Y1 - 2014
N2 - Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations. © 2013 Springer-Verlag Berlin Heidelberg.
AB - Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations. © 2013 Springer-Verlag Berlin Heidelberg.
UR - https://www.mendeley.com/catalogue/0e055323-b55d-362c-94f3-0c5aaaea12bd/
UR - https://www.mendeley.com/catalogue/0e055323-b55d-362c-94f3-0c5aaaea12bd/
U2 - 10.1007/s00542-013-2026-2
DO - 10.1007/s00542-013-2026-2
M3 - Paper
ER -