Compact optical position feedback scheme for MOEMS mirrors

Research output: Contribution to conference (No Proceedings)Paperpeer-review

Abstract

Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations. © 2013 Springer-Verlag Berlin Heidelberg.
Original languageEnglish
Number of pages7
DOIs
Publication statusPublished - 2014

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