Original language | English |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
DOIs | |
Publication status | Published - 2011 |
Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review