Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
Publication statusPublished - 2011

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