Closed-loop control of quasi-static MOEMS mirrors

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TY - CONF

T1 - Closed-loop control of quasi-static MOEMS mirrors

AU - Holzmann, D.

AU - Lenzhofer, M.

AU - Tortschanoff, A.

PY - 2012

Y1 - 2012

UR - https://www.mendeley.com/catalogue/1b7f5ce4-e95e-39c0-996d-7add92cd2070/

U2 - 10.5162/sensoren2012/p1.2

DO - 10.5162/sensoren2012/p1.2

M3 - Paper

ER -