Closed-loop control for quasi-static MOEMS mirrors

A. Tortschanoff; D. Holzmann; M. Lenzhofer; T. Sandner

doi:10.1117/12.907825

Closed-loop control for quasi-static MOEMS mirrors

A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

Abstract

In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems XI
Pages	82520T
DOIs	https://doi.org/10.1117/12.907825
Publication status	Published - 9 Feb 2012

Publication series

Name	MOEMS and Miniaturized Systems XI
Volume	8252

Access to Document

10.1117/12.907825

Cite this

@inbook{7ac23348d4874d339f3159ce9e5ed446,

title = "Closed-loop control for quasi-static MOEMS mirrors",

abstract = "In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.",

author = "A. Tortschanoff and D. Holzmann and M. Lenzhofer and T. Sandner",

year = "2012",

month = feb,

day = "9",

doi = "10.1117/12.907825",

language = "English",

isbn = "9780819488954",

series = "MOEMS and Miniaturized Systems XI",

pages = "82520T",

booktitle = "MOEMS and Miniaturized Systems XI",

}

TY - CHAP

T1 - Closed-loop control for quasi-static MOEMS mirrors

AU - Tortschanoff, A.

AU - Holzmann, D.

AU - Lenzhofer, M.

AU - Sandner, T.

PY - 2012/2/9

Y1 - 2012/2/9

N2 - In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.

AB - In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.

UR - https://www.mendeley.com/catalogue/0ba9684e-69a3-31e8-b0b0-683bfabfe8ef/

U2 - 10.1117/12.907825

DO - 10.1117/12.907825

M3 - Chapter

SN - 9780819488954

T3 - MOEMS and Miniaturized Systems XI

SP - 82520T

BT - MOEMS and Miniaturized Systems XI

ER -

Closed-loop control for quasi-static MOEMS mirrors

Abstract

Publication series

Access to Document

Other files and links

Fingerprint

Cite this