Closed-loop control driver for quasi-static MOEMS mirrors

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	MOEMS and Miniaturized Systems XII
Volume	12
DOIs	https://doi.org/10.1117/12.2004167
Publication status	Published - Mar 2013

Access to Document

@inproceedings{63cd9d5f7e4440d892db72b564d5eb25,

title = "Closed-loop control driver for quasi-static MOEMS mirrors",

author = "Andreas Tortschanoff and Dominik Holzmann and Martin Lenzhofer and T. Sandner and Andreas Kenda",

year = "2013",

month = mar,

doi = "10.1117/12.2004167",

language = "English",

volume = "12",

booktitle = "MOEMS and Miniaturized Systems XII",

}