Characterization of mid IR photonic MEMS

F.J. Maier, C. Consani, C. Ranacher, A. Kenda, M. Gröschl, A. Tortschanoff

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
Publication status	Published - 2016

Cite this

@inproceedings{01728b2271424fd09b14ba1b0918626a,

title = "Characterization of mid IR photonic MEMS",

author = "F.J. Maier and C. Consani and C. Ranacher and A. Kenda and M. Gr{\"o}schl and A. Tortschanoff",

year = "2016",

language = "undefiniert/unbekannt",

booktitle = "Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016",

}

TY - GEN

T1 - Characterization of mid IR photonic MEMS

AU - Maier, F.J.

AU - Consani, C.

AU - Ranacher, C.

AU - Kenda, A.

AU - Gröschl, M.

AU - Tortschanoff, A.

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84976327008&partnerID=MN8TOARS

M3 - Konferenzartikel

BT - Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016

ER -