Characterization of mid IR photonic MEMS

F.J. Maier, C. Consani, C. Ranacher, A. Kenda, M. Gröschl, A. Tortschanoff

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Original languageUndefined/Unknown
Title of host publicationSmart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
Publication statusPublished - 2016

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