Aspherical High-Speed Varifocal Piezoelectric MEMS Mirror

Jaka Pribosek, Markus Bainschab, Adrien Piot, Mohssen Moridi

Photonic Systems (PHOS)

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495520
Publication status	Published - Feb 2021

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10.1109/Transducers50396.2021.9495520

Pribosek_Transducers2021_finalFinal published version, 1.38 MB

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