| Original language | English |
|---|---|
| Publication status | Published - Apr 2006 |
| Event | MEMS, MOEMS and Micromachining II : Proceedings of SPIE - Duration: 1 Jan 2006 → … |
Conference
| Conference | MEMS, MOEMS and Micromachining II |
|---|---|
| Period | 1/01/06 → … |
Application of a micromachined translatory actuator to an optical FTIR spectrometer
Andreas Kenda, Albert Frank, Martin Lenzhofer, Werner Scherf
Research output: Contribution to conference (No Proceedings) › Paper › peer-review