TY - JOUR
T1 - Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams
AU - Xu, Yu
AU - Zhao, Libo
AU - Jiang, Zhuangde
AU - Ding, Jianjun
AU - Xu, Tingzhong
AU - Zhao, Yulong
PY - 2016/8/15
Y1 - 2016/8/15
N2 - A novel piezoresistive accelerometer was developed with high performance in sensitivity, resonant frequency and cross-axis sensitivity. The accelerometer chip with axially stressed self-supporting sensing beams has been designed, fabricated and tested in our study. We derived the expressions for the location of the sensing beams, stresses and resonant frequency, and then these results were verified by the finite element method (FEM) simulation. The fabricated accelerometer was characterized by the static and dynamic experiments. The results showed that the measuring sensitivity was 0.666 mV/g/3 V and the resonant frequency was 17.1 kHz. Meanwhile, the proposed accelerometer provided an available method for the low cross-axis sensitivity design. Compared with other accelerometers in the literatures, the developed accelerometer exhibited an excellent performance concerning a comprehensive figure of merit (FOM). The results demonstrated the feasibility of the novel structure to improve the accelerometer's performance.
AB - A novel piezoresistive accelerometer was developed with high performance in sensitivity, resonant frequency and cross-axis sensitivity. The accelerometer chip with axially stressed self-supporting sensing beams has been designed, fabricated and tested in our study. We derived the expressions for the location of the sensing beams, stresses and resonant frequency, and then these results were verified by the finite element method (FEM) simulation. The fabricated accelerometer was characterized by the static and dynamic experiments. The results showed that the measuring sensitivity was 0.666 mV/g/3 V and the resonant frequency was 17.1 kHz. Meanwhile, the proposed accelerometer provided an available method for the low cross-axis sensitivity design. Compared with other accelerometers in the literatures, the developed accelerometer exhibited an excellent performance concerning a comprehensive figure of merit (FOM). The results demonstrated the feasibility of the novel structure to improve the accelerometer's performance.
KW - Accelerometer
KW - Axially stressed self-supporting sensing beams
KW - Comprehensive figure of merit
KW - Cross-axis sensitivity
KW - Resonant frequency
KW - Sensitivity
UR - https://www.mendeley.com/catalogue/40484b16-01e0-30fe-8572-c41b824a3cc3/
U2 - 10.1016/j.sna.2016.04.053
DO - 10.1016/j.sna.2016.04.053
M3 - Article
SN - 0924-4247
VL - 247
SP - 1
EP - 11
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
ER -