An ultrathin flexible array of piezoelectric MEMS microphones (20-E-16)

@misc{195fe79820844494ab9662989680660e,

title = "An ultrathin flexible array of piezoelectric MEMS microphones (20-E-16)",

author = "Lixiang Wu",

year = "2021",

language = "English",

type = "Patent",

}

Research output: Patent

TY - PAT

T1 - An ultrathin flexible array of piezoelectric MEMS microphones (20-E-16)

AU - Wu, Lixiang

PY - 2021

Y1 - 2021

M3 - Patent

ER -

Original language	English
Publication status	Submitted - 2021

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